Vacuum Pump for Clean Room | Oil-Free Industrial Solutions

When a semiconductor fab in Malaysia needed to maintain a Class 10 cleanroom​ vacuum without hydrocarbon contamination, our Cleanroom Dry Vacuum Pump—featuring multi-stage HEPA filtration​ and PTFE-coated rotors—captured 99.97% of particulates ≥0.3 µm​ while delivering zero oil vapor backstreaming, verified by TÜV-certified ISO 8573-1 Class 0​ purity. Unlike conventional oil-sealed pumps where degraded oil circulates contaminants back into the chamber, our dry screw technology​ with state-of-the-art filtration​ physically blocks particulate migration, preventing the $2.3M average loss​ from a single contaminated wafer batch. Every unit is CE certified, assembled under ISO 9001​ controls, and backed by 24/7 IoT monitoring​ that tracks filter differential pressure in real time, alerting your team before efficiency drops.

When a Swiss pharmaceutical lab noticed microscopic v failures in their freeze-dried vials, their root-cause analysis pointed to subtle pressure fluctuations​ from high by high-vibration pumps—each vibration pulse transmitted through the floor was enough to disrupt the delicate filling process. Our Cleanroom Dry Vacuum Pump—featuring active magnetic levitation bearings​ and a composite acoustic enclosure—operates at just 58 dB(A)​ with vibration levels below 1.0 mm/s, eliminating floor-transmitted pulses entirely. Unlike conventional belt-drive pumps that generate >75 dB(A)​ and require bulky anti-vibration mounts, our direct-drive design​ with precision-balanced rotors​ ensures smooth, whisper-quiet operation that won't compromise nearby sensitive instruments. Every unit is CE certified, assembled under ISO 9001​ controls, and tested to ISO 21360-1​ standards, with 24/7 IoT monitoring​ tracking vibration spectra in real time to predict bearing wear before it affects your process.